subfab

名词 n.
中文释义

英文释义

名词 n.
  1. The area underneath a semiconductor fabrication plant
    — Line A involved a 121,000 ft 2 area, with downdraft laminar flow and flow-through ventilation from fab to subfab areas; the facility uses an open bay and chase design, such that SEGs may overlap within process bays or maintenance chases.

词形变化

subfabs plural

词源

From sub- + fab.
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