octafluorocyclobutane

名词 n.
中文释义

英文释义

名词 n.
  1. The organofluorine compound C₄F₈, related to cyclobutane by replacement of all C–H bonds with C–F bonds, and used as a deposition gas and etchant in semiconductor manufacture. uncountable

词源

From octa- + fluoro- + cyclobutane.
0 次浏览 数据来源: Wiktionary