microlithography

名词 n.
中文释义

英文释义

名词 n.
  1. Any of several techniques for the production of microscale devices; especially the production of semiconductor devices using beams of photons or electrons. uncountable

词源

Etymology tree
Proto-Indo-European *mey-der.?
Ancient Greek μικρός (mikrós)der.
English micro-
English lithography
English microlithography
From micro- + lithography.
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