epitaxial layer

名词 n.

英文释义

名词 n.
  1. In semiconductor fabrication: a single crystal layer formed on top of a single crystal substrate.
    — It should be noted that a high temperature anneal in Ar, H₂, or high vacuum is a well established pre-epitaxial growth step by which a native oxide film is removed to obtain a good quality epitaxial layer[…].

词形变化

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